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Electronic grade hydrofluoric acid

 

molecular formula: HF-H20

Physicochemical property: it is colorless transparent liquid with weak acidity and strong corrosion property

Quality index (Q/KAIHN01-2009):

grade UP-S UP EL
ITEM UNIT index index index
contentASSAY % 49%±0.2 49%±0.2 49%±0.2
fluosilicic acid(H2SiF6) mg/L ≤100 ≤100 ≤100
oxide(CL) mg/L ≤5 ≤5 ≤5
nitrate(NO3) mg/L ≤3 ≤3 ≤3
phosphate (PO4) mg/L ≤1 ≤1 ≤1
sulfate and sulfite mg/L ≤5 ≤5 ≤5
COLOR HAZEN ≤10 ≤10 ≤10
particle (≥1.0μm) Ea/ml ≤10 ≤25 ≤25
As PPB ≤1 ≤10 ≤100
Li PPB ≤1 ≤10 ≤100
Na PPB ≤1 ≤10 ≤100
Mg PPB ≤1 ≤10 ≤100
Al PPB ≤1 ≤10 ≤100
K PPB ≤1 ≤10 ≤100
Ca PPB ≤1 ≤10 ≤100
Cr PPB ≤1 ≤10 ≤100
Fe PPB ≤1 ≤10 ≤100
Co PPB ≤1 ≤10 ≤100
Ni PPB ≤1 ≤10 ≤100
Cu PPB ≤1 ≤10 ≤100
Zn PPB ≤1 ≤10 ≤100
Ga PPB ≤1 ≤10 ≤100
Mo PPB ≤1 ≤10 ≤100
Ag PPB ≤1 ≤10 ≤100
Cd PPB ≤1 ≤10 ≤100
Sn PPB ≤1 ≤10 ≤100
Ba PPB ≤1 ≤10 ≤100
Pt PPB ≤1 ≤10 ≤100
Au PPB ≤1 ≤10 ≤100
Mn PPB ≤1 ≤10 ≤100
Pb PPB ≤1 ≤10 ≤100
Ti PPB ≤1 ≤10 ≤100
Be PPB ≤1 ≤10 ≤100
B PPB ≤1 ≤10 ≤100
V PPB ≤1 ≤10 ≤100
Ge PPB ≤1 ≤10 ≤100
Sr PPB ≤1 ≤10 ≤100
Zr PPB ≤1 ≤10 ≤100
Bi PPB ≤1 ≤10 ≤100
Sb PPB ≤1 ≤10 ≤100

Uses: It is mainly used in integrated circuit industry for chip cleaning. It is essential chemical in micro electronic technique aspect. It is also used in TFT-LCD industry for etching of glass substrate, silicon nitride, silicon dioxide. And it is applied in solar cell industry for silicon surface cleaning.

Packing specification: 1000L IBC container; 200L drum, 20L drum, 5L GPB

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